raster-scan electron-beam lithography equipment


raster-scan electron-beam lithography equipment
elektronpluoštis rastrinis litografijos įrenginys statusas T sritis radioelektronika atitikmenys: angl. raster-scan electron-beam lithography equipment vok. Rasterscan-Anlage, f rus. установка растровой электронно-лучевой литографии, f pranc. équipement de lithographie à faisceau d'électrons avec balayage de trame, m

Radioelektronikos terminų žodynas. – Vilnius : BĮ UAB „Litimo“. . 2000.

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  • Electron beam lithography — (often abbreviated as e beam lithography) is the practice of scanning a beam of electrons in a patterned fashion across a surface covered with a film (called the resist),cite book |last= McCord |first=M. A. |coauthors=M. J. Rooks |title=… …   Wikipedia

  • Rasterscan-Anlage — elektronpluoštis rastrinis litografijos įrenginys statusas T sritis radioelektronika atitikmenys: angl. raster scan electron beam lithography equipment vok. Rasterscan Anlage, f rus. установка растровой электронно лучевой литографии, f pranc.… …   Radioelektronikos terminų žodynas

  • elektronpluoštis rastrinis litografijos įrenginys — statusas T sritis radioelektronika atitikmenys: angl. raster scan electron beam lithography equipment vok. Rasterscan Anlage, f rus. установка растровой электронно лучевой литографии, f pranc. équipement de lithographie à faisceau d électrons… …   Radioelektronikos terminų žodynas

  • équipement de lithographie à faisceau d'électrons avec balayage de trame — elektronpluoštis rastrinis litografijos įrenginys statusas T sritis radioelektronika atitikmenys: angl. raster scan electron beam lithography equipment vok. Rasterscan Anlage, f rus. установка растровой электронно лучевой литографии, f pranc.… …   Radioelektronikos terminų žodynas

  • установка растровой электронно-лучевой литографии — elektronpluoštis rastrinis litografijos įrenginys statusas T sritis radioelektronika atitikmenys: angl. raster scan electron beam lithography equipment vok. Rasterscan Anlage, f rus. установка растровой электронно лучевой литографии, f pranc.… …   Radioelektronikos terminų žodynas

  • Photolithography — For earlier uses of photolithography in printing, see Lithography. For the same process applied to metal, see Photochemical machining. Photolithography (or optical lithography ) is a process used in microfabrication to selectively remove parts of …   Wikipedia


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